Double selector element for low voltage bipolar memory devices

ABSTRACT

Embedded non-volatile memory structures having double selector elements are described. In an example, a memory device includes a word line. A double selector element is above the word line. The double selector element includes a first selector material layer, a second selector material layer different than the first selector material layer, and a conductive layer directly between the first selector material layer and the second selector material layer. A bipolar memory element is above the word line. A conductive electrode is between the double selector element and the bipolar memory element. A bit line is above the word line.

CROSS-REFERENCE TO RELATED APPLICATION

This patent application is a divisional of U.S. patent application Ser.No. 16/632,065, filed Jan. 17, 2020, which is a U.S. National PhaseApplication under 35 U.S.C. § 371 of International Application No.PCT/US2017/053850, filed Sep. 27, 2017, entitled “DOUBLE SELECTORELEMENT FOR LOW VOLTAGE BIPOLAR MEMORY DEVICES,” which designates theUnited States of America, the entire disclosure of which are herebyincorporated by reference in their entirety and for all purposes.

TECHNICAL FIELD

Embodiments of the disclosure are in the field of integrated circuitstructures and, in particular, double selector elements for low voltagebipolar memory devices.

BACKGROUND

For the past several decades, the scaling of features in integratedcircuits has been a driving force behind an ever-growing semiconductorindustry. Scaling to smaller and smaller features enables increaseddensities of functional units on the limited real estate ofsemiconductor chips. For example, shrinking transistor size allows forthe incorporation of an increased number of memory devices on a chip,lending to the fabrication of products with increased functionality. Thedrive for ever-more functionality, however, is not without issue. It hasbecome increasingly significant to rely heavily on innovativefabrication techniques to meet the exceedingly tight tolerancerequirements imposed by scaling.

Embedded memory with non-volatile memory devices, e.g., on-chip embeddedmemory with non-volatility can enable energy and computationalefficiency. A non-volatile memory device such as magnetic tunneljunction (MTJ) memory device or resistive random access memory (RRAM)device is coupled with selector element to form a memory cell. A largecollection of memory cells forms a key component of non-volatileembedded memory. However, with scaling of memory devices, the technicalchallenges of assembling a vast number of memory cells presentsformidable roadblocks to commercialization of this technology today.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional view of a single selector element,and a corresponding I-V plot.

FIG. 2 illustrates a cross-sectional view of another single selectorelement, and a corresponding I-V plot.

FIG. 3 illustrates a cross-sectional view of a double selector element,and a corresponding I-V plot, in accordance with an embodiment of thepresent disclosure.

FIG. 4A illustrates a cross-sectional illustration of a memory celldisposed above a substrate, in accordance with an embodiment of thepresent disclosure.

FIG. 4B illustrates a plan view of the memory cell of FIG. 4A.

FIG. 4C illustrates a cross-sectional illustration of a memory cell, inaccordance with an embodiment of the present disclosure.

FIG. 4D illustrates a cross-sectional view of a memory cell thatincludes a bipolar memory element such as a resistive random accessmemory (RRAM) device disposed above the conductive electrode, inaccordance with an embodiment of the present disclosure.

FIG. 4E illustrates a cross-sectional view of a memory cell thatincludes a bipolar memory element such as a magnetic tunnel junction(MTJ) memory device disposed above a conductive electrode, in accordancewith an embodiment of the present disclosure.

FIG. 5A illustrates a cross-sectional view of stacked memory cells thatshare a common word line, in accordance with an embodiment of thepresent disclosure.

FIG. 5B illustrates a cross-sectional view of stacked memory cells wherea first double selector element of a first memory cell shares a commonword line with a second double selector element of a second memory cell,in accordance with an embodiment of the present disclosure.

FIG. 5C illustrates a cross-sectional view of stacked memory cells wherea first memory element of a first memory cell shares a common word linewith a second memory element of a second memory cell, in accordance withan embodiment of the present disclosure.

FIG. 5D illustrates a cross-sectional view of stacked memory cells thatshare a common word line, in accordance with an embodiment of thepresent disclosure.

FIG. 5E illustrates a plan view of the memory cell along the directionA-A′ in FIG. 5A.

FIG. 5F illustrates a plan view of the memory cell, along the directionB-B′ in FIG. 5A.

FIGS. 6A-6F illustrate cross-sectional views representing variousoperations in a method of fabricating a memory cell, where:

FIG. 6A illustrates a word line formed in an opening in a dielectriclayer formed above a substrate.

FIG. 6B illustrates the structure of FIG. 6A following the formation ofa double selector material layer stack, a conductive electrode layer anda bipolar memory material layer stack.

FIG. 6C illustrates the structure of FIG. 6B following the patterning ofthe bipolar memory material layer stack and the conductive electrodelayer.

FIG. 6D illustrates the structure of FIG. 6C following the patterning ofthe double selector material layer stack.

FIG. 6E illustrates the structure of FIG. 6D following the formation ofa second dielectric layer on the word line and on the dielectric layerand on the active memory device.

FIG. 6F illustrates a bit line formed on the uppermost surface of thememory element and on the uppermost surface of the second dielectriclayer to complete formation of a memory cell.

FIGS. 7A and 7B are top views of a wafer and dies that include one ormore embedded non-volatile memory structures having a double selectorelement, in accordance with one or more of the embodiments disclosedherein.

FIG. 8 illustrates a block diagram of an electronic system, inaccordance with an embodiment of the present disclosure.

FIG. 9 is a cross-sectional side view of an integrated circuit (IC)device assembly that may include one or more embedded non-volatilememory structures having a double selector element, in accordance withone or more of the embodiments disclosed herein.

FIG. 10 illustrates a computing device in accordance with oneimplementation of an embodiment of the disclosure.

DESCRIPTION OF THE EMBODIMENTS

Double selector elements for low voltage bipolar memory devices aredescribed. In the following description, numerous specific details areset forth, such as specific material and structural regimes, in order toprovide a thorough understanding of embodiments of the presentdisclosure. It will be apparent to one skilled in the art thatembodiments of the present disclosure may be practiced without thesespecific details. In other instances, well-known features, such assingle or dual damascene processing, are not described in detail inorder to not unnecessarily obscure embodiments of the presentdisclosure. Furthermore, it is to be understood that the variousembodiments shown in the Figures are illustrative representations andare not necessarily drawn to scale. In some cases, various operationswill be described as multiple discrete operations, in turn, in a mannerthat is most helpful in understanding the present disclosure, however,the order of description should not be construed to imply that theseoperations are necessarily order dependent. In particular, theseoperations need not be performed in the order of presentation.

Certain terminology may also be used in the following description forthe purpose of reference only, and thus are not intended to be limiting.For example, terms such as “upper”, “lower”, “above”, “below,” “bottom,”and “top” refer to directions in the drawings to which reference ismade. Terms such as “front”, “back”, “rear”, and “side” describe theorientation and/or location of portions of the component within aconsistent but arbitrary frame of reference which is made clear byreference to the text and the associated drawings describing thecomponent under discussion. Such terminology may include the wordsspecifically mentioned above, derivatives thereof, and words of similarimport.

Embodiments described herein may be directed to front-end-of-line (FEOL)semiconductor processing and structures. FEOL is the first portion ofintegrated circuit (IC) fabrication where the individual devices (e.g.,transistors, capacitors, resistors, etc.) are patterned in thesemiconductor substrate or layer. FEOL generally covers everything up to(but not including) the deposition of metal interconnect layers.Following the last FEOL operation, the result is typically a wafer withisolated transistors (e.g., without any wires).

Embodiments described herein may be directed to back end of line (BEOL)semiconductor processing and structures. BEOL is the second portion ofIC fabrication where the individual devices (e.g., transistors,capacitors, resistors, etc.) are interconnected with wiring on thewafer, e.g., the metallization layer or layers. BEOL includes contacts,insulating layers (dielectrics), metal levels, and bonding sites forchip-to-package connections. In the BEOL part of the fabrication stagecontacts (pads), interconnect wires, vias and dielectric structures areformed. For modern IC processes, more than 10 metal layers may be addedin the BEOL.

Embodiments described below may be applicable to FEOL processing andstructures, BEOL processing and structures, or both FEOL and BEOLprocessing and structures. In particular, although an exemplaryprocessing scheme may be illustrated using a FEOL processing scenario,such approaches may also be applicable to BEOL processing. Likewise,although an exemplary processing scheme may be illustrated using a BEOLprocessing scenario, such approaches may also be applicable to FEOLprocessing.

One or more embodiments described herein are directed to material stacksincluding two separate selector material layers of differing compositionfor use as a double (2S) selector element for a non-volatile memorydevice (1R). Embodiments may pertain to or include three-dimensional(3D) cross-point arrays, embedded non-volatile memory (eNVM), andselectors for eNVM. Approaches described herein may be implemented torealize high performance highly scaled eNVM cells, and potentiallyincrease monolithic integration of eNVM in system-on-chips (SoCs) offuture technology nodes. Approaches may be implemented to fabricate ahigh density and high performance cross-point memory cell, increasingthe potential of using scaled resistive memory cells for future eNVMapplications.

To provide context, non-volatile memory devices such as a magnetictunnel junction (MTJ) memory device or a resistive random access memory(RRAM) device depend on a phenomenon of resistance switching to storeinformation. The non-volatile memory device functions as a variableresistor where the resistance of the device may switch between a highresistance state and a low resistance state. A non-volatile memorydevice may be coupled with a selector element to form a memory cell. Theselector may be a volatile switching element that is placed in serieswith the non-volatile memory device. A large collection of such memorycells forms a key component of non-volatile embedded memory. Operating amemory cell including a selector and a non-volatile memory element mayrequire sufficiently low threshold selector turn-on voltages (e.g. lessthan or equal to 1V) in order to minimize power consumption.

In accordance with one or more embodiments of the present disclosure, adouble selector element is used together with a memory element. Thedouble selector element includes a first selector material layer, asecond selector material layer different than the first selectormaterial layer, and a conductive layer directly between the firstselector material layer and the second selector material layer. In anembodiment, a bipolar memory element is coupled to the double selectorelement. In an embodiment, the bipolar memory element includes anon-volatile memory device such as a magnetic tunnel junction (MTJ)memory device or a resistive random access memory (RRAM) device. Thebipolar memory element may be designed to operate at sufficiently lowvoltages such as 1V or less. In an embodiment, the total voltagerequirement for operation of the memory cell including the doubleselector element and the non-volatile memory element is less than 2V. Inan embodiment, a conductive electrode is disposed between the doubleselector element and the bipolar memory element. The memory cell furtherincludes a bit line disposed above the selector element. In anembodiment, a large collection of memory cells each including a doubleselector element and a bipolar memory element are utilized to form anon-volatile memory array. The non-volatile memory array formed by amemory cell at each intersection of a word line and a bit line is,herein, referred to as a non-volatile cross-point memory array. Anon-volatile cross-point memory array can offer significant advantagesfor scaling to achieve high density memory.

In accordance with one or more embodiments of the present disclosure,high density 4F2 embedded memory based on two selector (2S)/one resistor(1R) cell cross-point structures is described. It is to be appreciatedthat for state-of-the-art one selector/one resistor (1S1R) structures,it may be very challenging to find an appropriate selector with devicecharacteristics suitable to integrate with, e.g., an RRAM memory toavoid read/write disturbs. By contrast, in an embodiment, integration oftwo selectors with different characteristics is described, where theintegrated selector characteristics become compatible with, e.g., anRRAM memory to avoid program/erase disturbs and improve functionalityand yield.

To demonstrate concepts described herein, challenges withstate-of-the-art 1S1R for two different types of selectors (e.g., basedon the threshold voltages) are described below in association with FIGS.1 and 2. As a first example of a state-of-the-art selector stack, FIG. 1illustrates a cross-sectional view of a single selector element, and acorresponding I-V plot.

Referring to FIG. 1, a 1S1R stack 150 includes a non-volatile memorystack (M) 152 and a single selector (S(i)) 154 with interveningconductive electrodes (shaded regions above, between, and below 152 and154). In this case, the voltage threshold for selector switching (SW) isabout the same as the threshold voltage (Vth) of the memory stack (M)152. The IV curve 100 illustrates the 1S1R stack 150 in operation.

As a second example of a state-of-the-art selector stack, FIG. 2illustrates a cross-sectional view of another single selector element,and a corresponding I-V plot. Referring to FIG. 2, a 1S1R stack 250includes a non-volatile memory stack (M) 252 and a single selector(S(i)) 254 with intervening conductive electrodes (shaded regions above,between, and below 252 and 254). In this case, the voltage threshold forselector switching (SW) is greater than the threshold voltage (Vth) ofthe memory stack (M) 252. The IV curve 200 illustrates the 1S1R stack250 in operation.

Referring collectively to FIGS. 1 and 2, depending on the selectorcharacteristics (e.g., switching voltage) the 1S1R cell 150 or 250exhibits acceptable inhibit characteristics, or acceptable read window(e.g., signal to noise) characteristics, or acceptable low disturbcharacteristics. However, neither stack 150 or 250 exhibits acceptablecharacteristics for all three parameters. Furthermore, snap-back relatedparasitic discharge issues may arise in either case.

In an embodiment, a 2S/1R stack is described which may exhibit one ormore of the following advantages: the ability to tune for highwrite/read and inhibit margins by placing selector voltage thresholds inseries, minimized variability, or controlled overshoot from snap-back.In contrast to FIGS. 1 and 2, FIG. 3 illustrates a cross-sectional viewof a double selector element, and a corresponding I-V plot, inaccordance with an embodiment of the present disclosure.

Referring to FIG. 3, a 2S1R stack 350 includes a non-volatile memorystack (M) 352, a first selector (S(i)) 356, and an intervening secondselector 354. Intervening conductive electrodes (shaded regions above,between, and below 352, 354 and 356) are also depicted. The expectedintegrated simulated IV curve 300 illustrates the 2S1R stack 350 inoperation.

Referring collectively to FIGS. 1-3, in an embodiment, the integrationof different selectors in series enables engineering of an integrated2S-1R memory cell for successful programing and read. As shown in FIGS.1 and 2, a relatively wider read-window is demonstrated for a 1S1R cell.Additionally, the write and read inhibit conditions exhibit very lowleakage for a 1S1R cell. Implementing a 2S1R cell provides theopportunity to exploit such 1S1R characteristics but for integratedhigher density arrays with high yield (e.g., due to the larger operationwindow, despite variability). Implementation of a 2S1R cell may improveperformance and reliability of cross-point RRAM memory cells (or othere-NVM cells, such as STTM-based cells). It is to be appreciated that thefeasibility may depend on the ability to engineer the individualselector characteristics that are serially connected in the 2S1Rstructure. In one embodiment, individual selector characteristics can betuned to provide targeted integrated selector and memory characteristicsfor 2S1R. As described below, various process routes or architecturescan be implemented to integrate the 2S+1R for high density cross-pointarrays.

In an exemplary implementation, FIG. 4A illustrates a cross-sectionalillustration of a memory cell 400 disposed above a substrate 450. Thememory cell 400 includes a word line 402 disposed above the substrate.In an embodiment, a double selector element 404 is disposed above theword line. In an embodiment, a conductive electrode 406 is disposed onthe double selector element 404. In an embodiment, a bipolar memoryelement 408 is disposed above the conductive electrode 406, and a bitline 410 is disposed above the bipolar memory element 408.

In an embodiment, the double selector element includes a first selectormaterial layer 404A and a second selector material layer 404B. Anintervening conductive layer 404C, which may be referred to as anintervening electrode layer, is between the first 404A and second 404Bselector material layers. The first 404A and second 404B selectormaterial layers are different in composition from one another.

In a first example of suitable selector materials, in an embodiment, oneor both of the first selector material layer 404A and the secondselector material layer 404B includes a phase change material.

In an embodiment, the phase change material exhibits at least twodifferent states or extents of crystallinity. In an embodiment, thephase change material includes Ge and Te. In one such embodiment, thephase change material further includes Sb. In an embodiment, the phasechange material includes a ternary alloy of Ge, Te and Sb such asGe₂Sb₂Te₅. In an embodiment, the phase change material includes a binaryalloy, ternary alloy or a quaternary alloy including at least one of Te,Se, or S. In an embodiment, the phase change material includes a binaryalloy, ternary alloy or a quaternary alloy which includes at least oneof Te, Se, or S, where said alloy further includes one element from thegroup V periodic table such as Sb. In an embodiment, the dopantconcentration is between 5% and 20% of the total composition of thephase change material. In an embodiment, the phase change materialexhibits at least two different states, amorphous and crystalline withmarked differences in electrical resistance. In an embodiment, the phasechange material is in an amorphous state for application as a volatileselector element. In an embodiment, the selector element 104 has athickness between 20 nanometers-60 nanometers.

In a second example of suitable selector materials, in an embodiment,one or both of the first selector material layer 404A and the secondselector material layer 404B includes an insulator metal transitionmaterial layer.

In an embodiment, the insulator metal transition material layer isselected from the group consisting of a vanadium oxide material and aniobium oxide material. In an embodiment, the insulator metal transitionmaterial layer is a single crystalline material. In another embodiment,the insulator metal transition material layer is an amorphous or apolycrystalline material.

In a third example of suitable selector materials, in an embodiment, oneor both of the first selector material layer 404A and the secondselector material layer 404B includes a semiconducting oxide material.

In an embodiment, the semiconducting oxide material layer is one suchas, but not limited to, indium gallium zirconium oxide (IGZO), tinoxide, antimony oxide, indium oxide, indium tin oxide, titanium oxide,zinc oxide, indium zinc oxide, gallium oxide, titanium oxynitride,ruthenium oxide, or tungsten oxide. In one embodiment, an IGZO layer isused and has a gallium to indium ratio of 1:1, a gallium to indium ratiogreater than 1 (e.g., 2:1, 3:1, 4:1, 5:1, 6:1, 7:1, 8:1, 9:1, or 10:1),or a gallium to indium ratio less than 1 (e.g., 1:2, 1:3, 1:4, 1:5, 1:6,1:7, 1:8, 1:9, or 1:10). A low indium content IGZO may refer to IGZOhaving more gallium than indium (e.g., with a gallium to indium ratiogreater than 1:1), and may also be referred to as high gallium contentIGZO. Similarly, low gallium content IGZO may refer to IGZO having moreindium than gallium (e.g., with a gallium to indium ratio less than1:1), and may also be referred to as high indium content IGZO.

It is to be appreciated that the first selector material layer 404A andthe second selector material layer 404B need not be of the same materialtype. In an embodiment, one of the first selector material layer 404Aand the second selector material layer 404B includes a phase changematerial, and the other of the first selector material layer 404A andthe second selector material layer 404B includes an insulator metaltransition material layer. In another embodiment, one of the firstselector material layer 404A and the second selector material layer 404Bincludes a phase change material, and the other of the first selectormaterial layer 404A and the second selector material layer 404B includesa semiconducting oxide material. In another embodiment, one of the firstselector material layer 404A and the second selector material layer 404Bincludes an insulator metal transition material, and the other of thefirst selector material layer 404A and the second selector materiallayer 404B includes a semiconducting oxide material.

In an embodiment, the intervening conductive layer 404C includes amaterial selected from the group consisting of WN, TiN, TaN, W, Ti, Taand Ru. In an embodiment, the intervening conductive layer 404C has athickness between 1 nanometer and 5 nanometers.

In an embodiment, the conductive electrode 406 is disposed on the doubleselector element 404. In an embodiment, the conductive electrode 406includes a material selected from the group consisting of WN, TiN, TaN,W, Ti, Ta and Ru. In an embodiment, the conductive electrode 406 has athickness between 5 nanometers and 10 nanometers.

In an embodiment, the memory device 408 includes a magnetic tunneljunction (MTJ) memory device as will be described in greater detailbelow in association with FIG. 4D. In an embodiment, the memory device408 includes a resistive random access memory (RRAM) device as will bedescribed in greater detail below in association with FIG. 4E.

FIG. 4B illustrates a plan view of the memory cell 400. In anembodiment, the word line 402 and the bit line 410 are arranged in anorthogonal manner. An outline 412 of the double selector element 404,conductive electrode 406 and bipolar memory element 408, relative to thebit line 410 and the word line 102 is also illustrated in FIG. 4B. In anembodiment, the double selector element 404, the conductive electrode406 and the bipolar memory element 408 are spatially confined to anintersection between the word line 402 and the bit line 408, which maybe referred to as a cross point memory cell.

FIG. 4C illustrates a cross-sectional illustration of a memory cell 400Cwhere the bipolar memory element 408 is disposed on the word line 402, aconductive electrode 406 is disposed on the bipolar memory element 408,and a doubleselector element 404 is disposed above the conductiveelectrode 406.

FIG. 4D illustrates a cross-sectional view of a memory cell 400D thatincludes a bipolar memory element such as a resistive random accessmemory (RRAM) device 420 disposed above the conductive electrode 406. Inan embodiment, the RRAM device 420 includes a bottom electrode 422, aswitching layer 424 including a metal oxide disposed on the bottomelectrode 422, an oxygen exchange layer 426 disposed on the switchinglayer 424, and a top electrode 430 disposed on the oxygen exchange layer426.

FIG. 4E illustrates a cross-sectional view of a memory cell 400E thatincludes a bipolar memory element such as a magnetic tunnel junction(MTJ) memory device 450 disposed above a conductive electrode 406. In anembodiment, the MTJ device 450 includes a bottom electrode 451 disposedabove the conductive electrode 406, a fixed magnet 454 disposed abovethe bottom electrode 451, a tunnel barrier 456 such as an MgO layerdisposed on the fixed magnet 454, a free magnet 458 disposed on thetunnel barrier 456, and a top electrode 460 disposed on the free magnet458.

In another example, FIG. 5A illustrates a cross-sectional view ofstacked memory cells 500 that shares a common word line. In anembodiment, the stacked memory cells include a first bit line 502, amemory cell 504 on the first bit line 502. In an embodiment, the firstmemory cell 504 includes a first double selector element 506 on thefirst bit line 506, a first conductive electrode 508 disposed on thefirst double selector element 506, and a first bipolar memory element510 disposed on the first conductive electrode 508. A word line 512 isdisposed on the first memory cell 504.

In an embodiment, a second memory cell 514 is disposed on the word line512. In an embodiment, the second memory cell 514 includes a seconddouble selector element 516 disposed on the word line, a secondconductive electrode 518 disposed on the second double selector element516 and a second bipolar memory element 520 disposed on the secondconductive electrode 518. A second bit line 522 is disposed on thesecond memory cell 514.

In an embodiment, the first memory device 510 includes a magnetic tunneljunction (MTJ) memory device as described in association with FIG. 4D.In an embodiment, the memory device 510 includes a resistive randomaccess memory (RRAM) device as described in association with FIG. 4E. Inan embodiment, the second memory device 520 is substantially the same asthe first memory device 510. In an embodiment, when the first memorydevice 510 includes a magnetic tunnel junction (MTJ) memory device, thenthe second memory device 520 also includes a magnetic tunnel junction(MTJ) memory device to ensure variation between the various memory cellsare minimized during stacked memory cell operation. In an embodiment,when the first memory device 510 includes a resistive random accessmemory (RRAM) device, then the second memory device 520 also includes aresistive random access memory (RRAM) device.

FIG. 5B illustrates a cross-sectional view of a stacked memory cell 500Bwhere the first double selector element 506 and the second doubleselector element 516 share a common word line. In an embodiment, a firstmemory cell 530 includes the first bipolar memory element 510 disposedon the first bit line 502, the first conductive electrode 508 disposedon the first bipolar memory element 510, and the first double selectorelement 506 disposed on the first conductive electrode 508. The wordline 512 is disposed on the first memory cell 530. In an embodiment, thesecond memory cell 514 is disposed on the word line 512. The secondmemory cell 514 includes the second double selector element 516.

FIG. 5C illustrates a cross-sectional view of stacked memory cells 500Cwhere the first memory element 510 of the first memory cell 504, sharesa common word line with the second memory element 520 of a second memorycell 540. In an embodiment, the first memory cell 504 is disposed on thefirst bit line 502. The word line 512 is disposed on the first memorycell 504. In an embodiment, the second memory cell 540 includes thesecond memory element 520 disposed on the word line 512, the secondconductive electrode 518 disposed on the second memory element 520, andthe second double selector element 516 disposed on the second conductiveelectrode 518.

FIG. 5D illustrates a cross-sectional view of a stacked memory cell 500Dwhere the second memory cell 540 is disposed above the first memory cell530. In an embodiment, word line 512 is disposed between the secondmemory cell 540 and the first memory cell 230.

FIG. 5E illustrates a plan view of the memory cell 500A along thedirection A-A′ in FIG. 5A. In an embodiment, the word line 512 and thefirst bit line 502 are arranged in an orthogonal manner. An outline ofthe first memory cell 504 relative to the first bit line 502 and theword line 512 is also illustrated in FIG. 5B. In an embodiment, thefirst memory cell 504 is spatially confined to an intersection betweenthe word line 512 and the first bit line 502, which may be referred toas a first cross point memory cell.

FIG. 5F illustrates a plan view of the memory cell 500A, along thedirection B-B′ in FIG. 5A. In an embodiment, the word line 512 and thesecond bit line 522 are arranged in an orthogonal manner. An outline ofthe second memory cell 514 relative to the second bit line 522 and theword line 512 is also illustrated in FIG. 5B. In an embodiment, thesecond memory cell 504 is spatially confined to an intersection betweenthe word line 512 and the second bit line 522, and may be referred to asa second cross point memory cell.

FIGS. 6A-6F illustrate cross-sectional views representing variousoperations in a method of fabricating a memory cell.

FIG. 6A illustrates a word line 600 formed in an opening in a dielectriclayer 601 formed above a substrate 602.

In an embodiment, the substrate 602 includes a suitable semiconductormaterial such as but not limited to, single crystal silicon,polycrystalline silicon and silicon on insulator (SOI). In anotherembodiment, substrate 602 includes other semiconductor materials such asgermanium, silicon germanium or a suitable group III-N or a group III-Vcompound.

In an embodiment, the word line 600 is formed in a dielectric layer 601by a damascene or a dual damascene process that is well known in theart. In an embodiment, the word line 600 includes a barrier layer, suchas titanium nitride, ruthenium, tantalum, tantalum nitride, and a fillmetal, such as copper, tungsten. In another embodiment, the word line600 includes a layer of a single material such as TiN or TaN. In anembodiment, the word line 600 is fabricated using a subtractive etchprocess when materials other than copper are utilized. In one suchembodiment, the word line 600 includes a material such as but notlimited to titanium nitride, ruthenium, tantalum, tantalum nitride. Inan embodiment, the dielectric layer 601 includes a material such as butnot limited to silicon dioxide, silicon nitride, silicon carbide, orcarbon doped silicon oxide. In an embodiment, the dielectric layer 601has an uppermost surface substantially co-planar with an uppermostsurface of the word line 600. In an embodiment, the dielectric layer 601has a total thickness between 70 nm-300 nm. In an embodiment, word line600 is electrically connected to a circuit element such as an accesstransistor (not shown). Logic devices such as access transistors may beintegrated with memory devices such as a MTJ device to form embeddedmemory.

FIG. 6B illustrates the structure of FIG. 6A following the formation ofa double selector material stack 609 on the word line, formation of aconductive electrode layer 611 on the double selector material stack609, and formation of a bipolar memory material layer stack 613 on theconductive electrode layer 611.

In an embodiment, the double selector material stack 609 is blanketdeposited on the word line 600 and on the dielectric layer 601. Thedouble selector material stack 609 includes a first selector materiallayer 609A, a conductive layer 609C, and a second selector materiallayer 609B. One or both of the first selector material layer 609A andthe second selector material layer 609B may be deposited using anevaporation process, an atomic layer deposition (ALD) process or achemical vapor deposition (CVD) process. In an embodiment, the chemicalvapor deposition process is enhanced by plasma techniques such as RFglow discharge (plasma enhanced CVD) to increase the density anduniformity of the film. In an embodiment, the conductive layer 609C isformed using physical vapor deposition (PVD) or using atomic layerdeposition (ALD).

In an embodiment, the conductive electrode layer 611 is blanketdeposited on the double selector material stack 609. In an embodiment,the conductive electrode layer 611 is deposited by a PVD process. In anembodiment, the conductive electrode layer 611 is deposited to athickness between 5 nm-10 nm.

In an embodiment, the memory material layer stack 613 is blanketdeposited on the on the conductive electrode layer 611. In anembodiment, the bipolar memory material layer stack 613 includes atleast three or more layers to fabricate a magnetic tunnel junction (MTJ)memory element. In one embodiment, the bipolar memory material layerstack for an MTJ memory element is deposited using a PVD process. Inanother embodiment, the bipolar memory material layer stack 613 includesat least three or more layers to fabricate a resistive random accessmemory (RRAM) memory element. In one embodiment, the bipolar memorymaterial layer stack for an RRAM memory element is deposited using a PVDprocess.

In an embodiment, an uppermost layer of memory material layer stack 613includes an uppermost electrode layer 613A (contained within dashedlines) that ultimately acts as a hardmask for patterning the memorymaterial layer stack 613 as well as the double selector material stack609. In an embodiment, the uppermost electrode layer has a thicknessbetween 70 nm-100 nm.

In an embodiment, when the bipolar memory material layer stack 613includes layers for an MTJ memory element the bipolar memory materiallayer stack 613 is subjected to an annealing process. In an embodiment,the annealing process is performed at a temperature between 300-400degrees Celsius.

FIG. 6C illustrates the structure of FIG. 6B following the patterning ofthe bipolar memory material layer stack 613 and the conductive electrodelayer 611. In an embodiment, a photoresist mask is formed on anuppermost surface of the bipolar memory material layer stack 613. In anembodiment, the photoresist mask defines a location where a memory cellwill be subsequently formed. In an embodiment, a plasma etch process isutilized to pattern the bipolar memory material layer stack 613 and theconductive electrode layer 611 to form a memory element 614 and aconductive electrode 612. In an embodiment, the plasma etch also etchesthe uppermost electrode 613A to form an uppermost electrode 614A.

FIG. 6D illustrates the structure of FIG. 6C following the patterning ofdouble selector material stack 609 to form double selector element 610.The double selector element includes a first selector 610A and a secondselector 610B. In an embodiment, an intervening conductive layer 610C,which may be referred to as an intervening electrode, is directlybetween the first selector 610A and the second selector 610B.

In an embodiment, a plasma etch process is utilized to pattern thedouble selector material stack 609 to form the double selector element610. In an embodiment, the plasma etch process erodes over 50% of theuppermost electrode 614A to form memory element 614, a conductiveelectrode 612 and double selector element 610. The memory element 614,conductive electrode 612 and double selector element 610 may be referredto as an active memory device 616.

FIG. 6E illustrates the structure of FIG. 6D following the formation ofa second dielectric layer 618 on the word line 600 and on the dielectriclayer 601 and on the active memory device 616. In an embodiment, asecond dielectric layer 618 is blanket deposited on the surface of thememory element 614, on sidewalls of the conductive electrode 612, onsidewalls of the double selector element 610, on the word line 600, andon the dielectric layer 601. In an embodiment, the dielectric layer 601includes an insulating material such as but not limited to siliconoxide, silicon carbide, carbon doped nitride and silicon nitride. In anembodiment, the second dielectric layer 618 is planarized. In anembodiment, the planarization process removes a portion of the uppermostelectrode 614A. In an embodiment, the planarization process forms asecond dielectric layer 618 having an uppermost surface that isco-planar or substantially coplanar with an uppermost surface of thememory element 614.

FIG. 6F illustrates a bit line 600 formed on the uppermost surface ofthe memory element 614 and on the uppermost surface of the seconddielectric layer 618 to complete formation of a memory cell 670. In anembodiment, a layer of a conductive material is blanket deposited on theuppermost surface of the memory element 614 and on the uppermost surfaceof the second dielectric layer 618. The layer of a conductive materialis then patterned to form a bit line 620. In an embodiment, the layer ofa conductive material includes a material such as W, TiN, TaN or Ru. Inan embodiment, the bit line 620 is formed by using a dual damasceneprocess (not shown) and includes a barrier layer such as Ru, Ta or Tiand a fill metal such as W or Cu.

It is to be appreciated that the layers and materials described inassociation with embodiments herein are typically formed on or above anunderlying semiconductor substrate, e.g., as FEOL layer(s). In otherembodiments, the layers and materials described in association withembodiments herein are formed on or above underlying device layer(s) ofan integrated circuit, e.g., as BEOL layer(s). In an embodiment, anunderlying semiconductor substrate represents a general workpiece objectused to manufacture integrated circuits. The semiconductor substrateoften includes a wafer or other piece of silicon or anothersemiconductor material. Suitable semiconductor substrates include, butare not limited to, single crystal silicon, polycrystalline silicon andsilicon on insulator (SOI), as well as similar substrates formed ofother semiconductor materials. The semiconductor substrate, depending onthe stage of manufacture, often includes transistors, integratedcircuitry, and the like. The substrate may also include semiconductormaterials, metals, dielectrics, dopants, and other materials commonlyfound in semiconductor substrates. Furthermore, although not depicted,structures described herein may be fabricated on underlying lower levelback end of line (BEOL) interconnect layers. For example, in oneembodiment, an embedded non-volatile memory structure is formed on amaterial composed of a dielectric material such as, but not limited to,silicon dioxide, silicon oxy-nitride, silicon nitride, or carbon-dopedsilicon nitride. In a particular embodiment, an embedded non-volatilememory structure is formed on a low-k dielectric layer of an underlyingBEOL layer.

In an embodiment, interconnect lines (and, possibly, underlying viastructures) described herein are composed of one or more metal ormetal-containing conductive structures. The conductive interconnectlines are also sometimes referred to in the art as traces, wires, lines,metal, interconnect lines or simply interconnects. In a particularembodiment, each of the interconnect lines includes a barrier layer anda conductive fill material. In an embodiment, the barrier layer iscomposed of a metal nitride material, such as tantalum nitride ortitanium nitride. In an embodiment, the conductive fill material iscomposed of a conductive material such as, but not limited to, Cu, Al,Ti, Zr, Hf, V, Ru, Co, Ni, Pd, Pt, W, Ag, Au or alloys thereof.

Interconnect lines described herein may be fabricated as a gratingstructure, where the term “grating” is used herein to refer to a tightpitch grating structure. In one such embodiment, the tight pitch is notachievable directly through conventional lithography. For example, apattern based on conventional lithography may first be formed, but thepitch may be halved by the use of spacer mask patterning, as is known inthe art. Even further, the original pitch may be quartered by a secondround of spacer mask patterning. Accordingly, the grating-like patternsdescribed herein may have conductive lines spaced at a constant pitchand having a constant width. The pattern may be fabricated by a pitchhalving or pitch quartering, or other pitch division, approach.

In an embodiment, ILD materials described herein are composed of orinclude a layer of a dielectric or insulating material. Examples ofsuitable dielectric materials include, but are not limited to, oxides ofsilicon (e.g., silicon dioxide (SiO₂)), doped oxides of silicon,fluorinated oxides of silicon, carbon doped oxides of silicon, variouslow-k dielectric materials known in the arts, and combinations thereof.The interlayer dielectric material may be formed by conventionaltechniques, such as, for example, chemical vapor deposition (CVD),physical vapor deposition (PVD), or by other deposition methods.

In an embodiment, as is also used throughout the present description,patterning of trenches is achieved using lithographic operationsperformed using 193 nm immersion lithography (i193), extremeultra-violet (EUV) and/or electron beam direct write (EBDW) lithography,or the like. A positive tone or a negative tone resist may be used. Inone embodiment, a lithographic mask is a trilayer mask composed of atopographic masking portion, an anti-reflective coating (ARC) layer, anda photoresist layer. In a particular such embodiment, the topographicmasking portion is a carbon hardmask (CHM) layer and the anti-reflectivecoating layer is a silicon ARC layer.

The integrated circuit structures described herein may be included in anelectronic device. As an example of one such apparatus, FIGS. 7A and 7Bare top views of a wafer and dies that include one or more embeddednon-volatile memory structures having a double selector element, inaccordance with one or more of the embodiments disclosed herein.

Referring to FIGS. 7A and 7B, a wafer 700 may be composed ofsemiconductor material and may include one or more dies 702 havingintegrated circuit (IC) structures formed on a surface of the wafer 700.Each of the dies 702 may be a repeating unit of a semiconductor productthat includes any suitable IC (e.g., ICs including one or more embeddednon-volatile memory structures having a double selector element, such asdescribed above. After the fabrication of the semiconductor product iscomplete, the wafer 700 may undergo a singulation process in which eachof the dies 702 is separated from one another to provide discrete“chips” of the semiconductor product. In particular, structures thatinclude embedded non-volatile memory structures having a double selectorelement as disclosed herein may take the form of the wafer 700 (e.g.,not singulated) or the form of the die 702 (e.g., singulated). The die702 may include one or more embedded non-volatile memory structuresbased on double selector elements and/or supporting circuitry to routeelectrical signals, as well as any other IC components. In someembodiments, the wafer 700 or the die 702 may include an additionalmemory device (e.g., a static random access memory (SRAM) device), alogic device (e.g., an AND, OR, NAND, or NOR gate), or any othersuitable circuit element. Multiple ones of these devices may be combinedon a single die 702. For example, a memory array formed by multiplememory devices may be formed on a same die 702 as a processing device orother logic that is configured to store information in the memorydevices or execute instructions stored in the memory array.

Embodiments disclosed herein may be used to manufacture a wide varietyof different types of integrated circuits and/or microelectronicdevices. Examples of such integrated circuits include, but are notlimited to, processors, chipset components, graphics processors, digitalsignal processors, micro-controllers, and the like. In otherembodiments, semiconductor memory may be manufactured. Moreover, theintegrated circuits or other microelectronic devices may be used in awide variety of electronic devices known in the arts. For example, incomputer systems (e.g., desktop, laptop, server), cellular phones,personal electronics, etc. The integrated circuits may be coupled with abus and other components in the systems. For example, a processor may becoupled by one or more buses to a memory, a chipset, etc. Each of theprocessor, the memory, and the chipset, may potentially be manufacturedusing the approaches disclosed herein.

FIG. 8 illustrates a block diagram of an electronic system 800, inaccordance with an embodiment of the present disclosure. The electronicsystem 800 can correspond to, for example, a portable system, a computersystem, a process control system, or any other system that utilizes aprocessor and an associated memory. The electronic system 800 mayinclude a microprocessor 802 (having a processor 804 and control unit806), a memory device 808, and an input/output device 810 (it is to beappreciated that the electronic system 800 may have a plurality ofprocessors, control units, memory device units and/or input/outputdevices in various embodiments). In one embodiment, the electronicsystem 800 has a set of instructions that define operations which are tobe performed on data by the processor 804, as well as, othertransactions between the processor 804, the memory device 808, and theinput/output device 810. The control unit 806 coordinates the operationsof the processor 804, the memory device 808 and the input/output device810 by cycling through a set of operations that cause instructions to beretrieved from the memory device 808 and executed. The memory device 808can include a non-volatile memory cell as described in the presentdescription. In an embodiment, the memory device 808 is embedded in themicroprocessor 802, as depicted in FIG. 8. In an embodiment, theprocessor 804, or another component of electronic system 800, includesone or more embedded non-volatile memory structures having a doubleselector element, such as those described herein.

FIG. 9 is a cross-sectional side view of an integrated circuit (IC)device assembly that may include one or more embedded non-volatilememory structures having a double selector element, in accordance withone or more of the embodiments disclosed herein.

Referring to FIG. 9, an IC device assembly 900 includes componentshaving one or more integrated circuit structures described herein. TheIC device assembly 900 includes a number of components disposed on acircuit board 902 (which may be, e.g., a motherboard). The IC deviceassembly 900 includes components disposed on a first face 940 of thecircuit board 902 and an opposing second face 942 of the circuit board902. Generally, components may be disposed on one or both faces 940 and942. In particular, any suitable ones of the components of the IC deviceassembly 900 may include a number of embedded non-volatile memorystructures having a double selector element, such as disclosed herein.

In some embodiments, the circuit board 902 may be a printed circuitboard (PCB) including multiple metal layers separated from one anotherby layers of dielectric material and interconnected by electricallyconductive vias. Any one or more of the metal layers may be formed in adesired circuit pattern to route electrical signals (optionally inconjunction with other metal layers) between the components coupled tothe circuit board 902. In other embodiments, the circuit board 902 maybe a non-PCB substrate.

The IC device assembly 900 illustrated in FIG. 9 includes apackage-on-interposer structure 936 coupled to the first face 940 of thecircuit board 902 by coupling components 916. The coupling components916 may electrically and mechanically couple the package-on-interposerstructure 936 to the circuit board 902, and may include solder balls (asshown in FIG. 9), male and female portions of a socket, an adhesive, anunderfill material, and/or any other suitable electrical and/ormechanical coupling structure.

The package-on-interposer structure 936 may include an IC package 920coupled to an interposer 904 by coupling components 918. The couplingcomponents 918 may take any suitable form for the application, such asthe forms discussed above with reference to the coupling components 916.Although a single IC package 920 is shown in FIG. 9, multiple ICpackages may be coupled to the interposer 904. It is to be appreciatedthat additional interposers may be coupled to the interposer 904. Theinterposer 904 may provide an intervening substrate used to bridge thecircuit board 902 and the IC package 920. The IC package 920 may be orinclude, for example, a die (the die 702 of FIG. 7B), or any othersuitable component. Generally, the interposer 904 may spread aconnection to a wider pitch or reroute a connection to a differentconnection. For example, the interposer 904 may couple the IC package920 (e.g., a die) to a ball grid array (BGA) of the coupling components916 for coupling to the circuit board 902. In the embodiment illustratedin FIG. 9, the IC package 920 and the circuit board 902 are attached toopposing sides of the interposer 904. In other embodiments, the ICpackage 920 and the circuit board 902 may be attached to a same side ofthe interposer 904. In some embodiments, three or more components may beinterconnected by way of the interposer 904.

The interposer 904 may be formed of an epoxy resin, afiberglass-reinforced epoxy resin, a ceramic material, or a polymermaterial such as polyimide. In some implementations, the interposer 904may be formed of alternate rigid or flexible materials that may includethe same materials described above for use in a semiconductor substrate,such as silicon, germanium, and other group III-V and group IVmaterials. The interposer 904 may include metal interconnects 908 andvias 910, including but not limited to through-silicon vias (TSVs) 906.The interposer 904 may further include embedded devices 914, includingboth passive and active devices. Such devices may include, but are notlimited to, capacitors, decoupling capacitors, resistors, inductors,fuses, diodes, transformers, sensors, electrostatic discharge (ESD)devices, and memory devices. More complex devices such asradio-frequency (RF) devices, power amplifiers, power managementdevices, antennas, arrays, sensors, and microelectromechanical systems(MEMS) devices may also be formed on the interposer 904. Thepackage-on-interposer structure 936 may take the form of any of thepackage-on-interposer structures known in the art.

The IC device assembly 900 may include an IC package 924 coupled to thefirst face 940 of the circuit board 902 by coupling components 922. Thecoupling components 922 may take the form of any of the embodimentsdiscussed above with reference to the coupling components 916, and theIC package 924 may take the form of any of the embodiments discussedabove with reference to the IC package 920.

The IC device assembly 900 illustrated in FIG. 9 includes apackage-on-package structure 934 coupled to the second face 942 of thecircuit board 902 by coupling components 928. The package-on-packagestructure 934 may include an IC package 926 and an IC package 932coupled together by coupling components 930 such that the IC package 926is disposed between the circuit board 902 and the IC package 932. Thecoupling components 928 and 930 may take the form of any of theembodiments of the coupling components 916 discussed above, and the ICpackages 926 and 932 may take the form of any of the embodiments of theIC package 920 discussed above. The package-on-package structure 934 maybe configured in accordance with any of the package-on-packagestructures known in the art.

FIG. 10 illustrates a computing device 1000 in accordance with oneimplementation of the disclosure. The computing device 1000 houses aboard 1002. The board 1002 may include a number of components, includingbut not limited to a processor 1004 and at least one communication chip1006. The processor 1004 is physically and electrically coupled to theboard 1002. In some implementations the at least one communication chip1006 is also physically and electrically coupled to the board 1002. Infurther implementations, the communication chip 1006 is part of theprocessor 1004.

Depending on its applications, computing device 1000 may include othercomponents that may or may not be physically and electrically coupled tothe board 1002. These other components include, but are not limited to,volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flashmemory, a graphics processor, a digital signal processor, a cryptoprocessor, a chipset, an antenna, a display, a touchscreen display, atouchscreen controller, a battery, an audio codec, a video codec, apower amplifier, a global positioning system (GPS) device, a compass, anaccelerometer, a gyroscope, a speaker, a camera, and a mass storagedevice (such as hard disk drive, compact disk (CD), digital versatiledisk (DVD), and so forth).

The communication chip 1006 enables wireless communications for thetransfer of data to and from the computing device 1000. The term“wireless” and its derivatives may be used to describe circuits,devices, systems, methods, techniques, communications channels, etc.,that may communicate data through the use of modulated electromagneticradiation through a non-solid medium. The term does not imply that theassociated devices do not contain any wires, although in someembodiments they might not. The communication chip 1006 may implementany of a number of wireless standards or protocols, including but notlimited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE,GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well asany other wireless protocols that are designated as 3G, 4G, 5G, andbeyond. The computing device 1000 may include a plurality ofcommunication chips 1006. For instance, a first communication chip 1006may be dedicated to shorter range wireless communications such as Wi-Fiand Bluetooth and a second communication chip 1006 may be dedicated tolonger range wireless communications such as GPS, EDGE, GPRS, CDMA,WiMAX, LTE, Ev-DO, and others.

The processor 1004 of the computing device 1000 includes an integratedcircuit die packaged within the processor 1004. In some implementationsof the disclosure, the integrated circuit die of the processor includesone or more embedded non-volatile memory structures having a doubleselector element, in accordance with implementations of embodiments ofthe disclosure. The term “processor” may refer to any device or portionof a device that processes electronic data from registers and/or memoryto transform that electronic data into other electronic data that may bestored in registers and/or memory.

The communication chip 1006 also includes an integrated circuit diepackaged within the communication chip 1006. In accordance with anotherimplementation of embodiments of the disclosure, the integrated circuitdie of the communication chip includes one or more embedded non-volatilememory structures having a double selector element, in accordance withimplementations of embodiments of the disclosure.

In further implementations, another component housed within thecomputing device 1000 may contain an integrated circuit die thatincludes one or more embedded non-volatile memory structures having adouble selector element, in accordance with implementations ofembodiments of the disclosure.

In various implementations, the computing device 1000 may be a laptop, anetbook, a notebook, an ultrabook, a smartphone, a tablet, a personaldigital assistant (PDA), an ultra mobile PC, a mobile phone, a desktopcomputer, a server, a printer, a scanner, a monitor, a set-top box, anentertainment control unit, a digital camera, a portable music player,or a digital video recorder. In further implementations, the computingdevice 1000 may be any other electronic device that processes data.

Thus, embodiments described herein include embedded non-volatile memorystructures having double selector elements.

The above description of illustrated implementations of embodiments ofthe disclosure, including what is described in the Abstract, is notintended to be exhaustive or to limit the disclosure to the preciseforms disclosed. While specific implementations of, and examples for,the disclosure are described herein for illustrative purposes, variousequivalent modifications are possible within the scope of thedisclosure, as those skilled in the relevant art will recognize.

These modifications may be made to the disclosure in light of the abovedetailed description. The terms used in the following claims should notbe construed to limit the disclosure to the specific implementationsdisclosed in the specification and the claims. Rather, the scope of thedisclosure is to be determined entirely by the following claims, whichare to be construed in accordance with established doctrines of claiminterpretation.

Example embodiment 1: A memory device includes a word line. A doubleselector element is above the word line. The double selector elementincludes a first selector material layer, a second selector materiallayer different than the first selector material layer, and a conductivelayer directly between the first selector material layer and the secondselector material layer. A bipolar memory element is above the wordline. A conductive electrode is between the double selector element andthe bipolar memory element. A bit line is above the word line.

Example embodiment 2: The memory device of example embodiment 1, whereinone or both of the first selector material layer and the second selectormaterial layer includes a phase change material.

Example embodiment 3: The memory device of example embodiment 1, whereinone or both of the first selector material layer and the second selectormaterial layer includes an insulator metal transition material layer.

Example embodiment 4: The memory device of example embodiment 1, whereinone or both of the first selector material layer and the second selectormaterial layer includes a semiconducting oxide material.

Example embodiment 5: The memory device of example embodiment 1, whereinthe first selector material layer includes a phase change material, andthe second selector material layer includes an insulator metaltransition material layer.

Example embodiment 6: The memory device of example embodiment 1, whereinthe first selector material layer includes a phase change material, andthe second selector material layer includes a semiconducting oxidematerial.

Example embodiment 7: The memory device of example embodiment 1, whereinthe first selector material layer includes an insulator metal transitionmaterial, and the second selector material layer includes asemiconducting oxide material.

Example embodiment 8: The memory device of example embodiment 1, 2, 3,4, 5, 6 or 7, wherein the conductive layer includes a material selectedfrom the group consisting of WN, TiN, TaN, W, Ti, Ta and Ru.

Example embodiment 9: The memory device of example embodiment 1, 2, 3,4, 5, 6, 7 or 8, wherein the double selector element has a thresholdvoltage less than or equal to 1V.

Example embodiment 10: The memory device of example embodiment 1, 2, 3,4, 5, 6, 7, 8 or 9, wherein the double selector element is above thebipolar memory element.

Example embodiment 11: The memory device of example embodiment 1, 2, 3,4, 5, 6, 7, 8 or 9, wherein the double selector element is below thebipolar memory element.

Example embodiment 12: The memory device of example embodiment 1, 2, 3,4, 5, 6, 7, 8, 9, 10 or 11, wherein the bipolar memory element includesa resistive random access memory (RRAM) device.

Example embodiment 13: The memory device of example embodiment 1, 2, 3,4, 5, 6, 7, 8, 9, 10 or 11, wherein the bipolar memory element includesa magnetic tunnel junction (MTJ) device.

Example embodiment 14: A memory structure includes a first bit lineabove a substrate, and a first memory cell on the first bit line. Thefirst memory cell includes a first double selector element above thefirst bit line, the first double selector element including a firstselector material layer, a second selector material layer different thanthe first selector material layer, and a conductive layer directlybetween the first selector material layer and the second selectormaterial layer. A word line is on the first memory cell. The memorystructure also includes a second memory cell on the word line. Thesecond memory cell includes a second double selector element above theword line, the second double selector element includes a first selectormaterial layer, a second selector material layer different than thefirst selector material layer, and a conductive layer directly betweenthe first selector material layer and the second selector materiallayer. A second bipolar memory element is above the word line. A secondconductive electrode is between the second double selector element andthe second bipolar memory element, and a second bit line is on thesecond memory cell.

Example embodiment 15: The memory structure of example embodiment 14,wherein the first double selector element is above the first bipolarmemory element, and the second double selector element is below thesecond bipolar memory element.

Example embodiment 16: The memory structure of example embodiment 14,wherein the first double selector element is below the first bipolarmemory element and the second double selector element is above thesecond bipolar memory element.

Example embodiment 17: The memory structure of example embodiment 14, 15or 16, wherein the first bipolar memory and the second bipolar memoryelement each include a resistive random access memory (RRAM) device, oreach include a magnetic tunnel junction (MTJ) device.

Example embodiment 18: A method of fabricating a memory device includesforming a bit line in a first dielectric layer above a substrate, andforming a double selector material stack on the bit line. The doubleselector material stack includes a first selector material layer, asecond selector material layer different than the first selectormaterial layer, and a conductive layer directly between the firstselector material layer and the second selector material layer. Themethod further includes forming a conductive electrode layer on thedouble selector material stack, forming a bipolar memory material layeron the conductive electrode layer, patterning the bipolar memorymaterial layer stack, patterning the conductive electrode layer to forma conductive electrode, forming a double selector element by using theconductive to pattern the double selector material stack, forming asecond dielectric layer on the hardmask, on sidewalls of the doubleselector element and on sidewalls of the bipolar memory element,planarizing the second dielectric layer to expose an uppermost surfaceof the bipolar memory element, and forming a word line on the uppermostsurface of the bipolar memory element and on an uppermost surface of thesecond dielectric layer.

Example embodiment 19: The method of example embodiment 18, whereinforming the bipolar memory material layer stack includes forming amaterial layer stack for a resistive random access memory device.

Example embodiment 20: The method of example embodiment 18, whereinforming the bipolar memory material layer stack includes forming amaterial layer stack for a magnetic tunnel junction device.

What is claimed is:
 1. A method of fabricating a memory device, themethod comprising: forming a bit line in a first dielectric layer abovea substrate; forming a double selector material stack on the bit line,the double selector material stack comprising a first selector materiallayer, a second selector material layer different than the firstselector material layer, and a conductive layer directly between thefirst selector material layer and the second selector material layer;forming a conductive electrode layer on the double selector materialstack; forming a bipolar memory material layer on the conductiveelectrode layer; patterning the bipolar memory material layer stack;patterning the conductive electrode layer to form a conductiveelectrode; forming a double selector element by using the conductive topattern the double selector material stack; forming a second dielectriclayer on the hardmask, on sidewalls of the double selector element andon sidewalls of the bipolar memory element; planarizing the seconddielectric layer to expose an uppermost surface of the bipolar memoryelement; and forming a word line on the uppermost surface of the bipolarmemory element and on an uppermost surface of the second dielectriclayer.
 2. The method of claim 1, wherein forming the bipolar memorymaterial layer stack comprises forming a material layer stack for aresistive random access memory device.
 3. The method of claim 1, whereinforming the bipolar memory material layer stack comprises forming amaterial layer stack for a magnetic tunnel junction device.
 4. A methodof fabricating a memory device, the method comprising: forming a wordline; forming a double selector element above the word line, the doubleselector element comprising a first selector material layer, a secondselector material layer different than the first selector materiallayer, and a conductive layer directly between the first selectormaterial layer and the second selector material layer; forming a bipolarmemory element above the word line; a conductive electrode between thedouble selector element and the bipolar memory element; and forming abit line above the word line.
 5. The method of claim 4, wherein one orboth of the first selector material layer and the second selectormaterial layer comprises a phase change material.
 6. The method of claim4, wherein one or both of the first selector material layer and thesecond selector material layer comprises an insulator metal transitionmaterial layer.
 7. The method of claim 4, wherein one or both of thefirst selector material layer and the second selector material layercomprises a semiconducting oxide material.
 8. The method of claim 4,wherein the first selector material layer comprises a phase changematerial, and the second selector material layer comprises an insulatormetal transition material layer.
 9. The method of claim 4, wherein thefirst selector material layer comprises a phase change material, and thesecond selector material layer comprises a semiconducting oxidematerial.
 10. The method of claim 4, wherein the first selector materiallayer comprises an insulator metal transition material, and the secondselector material layer comprises a semiconducting oxide material. 11.The method of claim 4, wherein the conductive layer comprises a materialselected from the group consisting of WN, TiN, TaN, W, Ti, Ta and Ru.12. The method of claim 4, wherein the double selector element has athreshold voltage less than or equal to 1V.
 13. The method of claim 4,wherein the double selector element is above the bipolar memory element.14. The method of claim 4, wherein the double selector element is belowthe bipolar memory element.
 15. The method of claim 4, wherein thebipolar memory element comprises a resistive random access memory (RRAM)device.
 16. The method of claim 4, wherein the bipolar memory elementcomprises a magnetic tunnel junction (MTJ) device.
 17. A method offabricating a memory device, the method comprising: forming a first bitline above a substrate; forming a first memory cell on the first bitline, the first memory cell comprising: a first double selector elementabove the word line, the first double selector element comprising afirst selector material layer, a second selector material layerdifferent than the first selector material layer, and a conductive layerdirectly between the first selector material layer and the secondselector material layer; a first bipolar memory element above the firstbit line; a first conductive electrode between the first double selectorelement and the first bipolar memory element; and a word line on thefirst memory cell; forming a second memory cell on the word line, thesecond memory cell comprising: a second double selector element abovethe word line, the second double selector element comprising a firstselector material layer, a second selector material layer different thanthe first selector material layer, and a conductive layer directlybetween the first selector material layer and the second selectormaterial layer; a second bipolar memory element above the word line; asecond conductive electrode between the second double selector elementand the second bipolar memory element; and forming a second bit line onthe second memory cell.
 18. The method of claim 17, wherein the firstdouble selector element is above the first bipolar memory element, andthe second double selector element is below the second bipolar memoryelement.
 19. The method of claim 17, wherein the first double selectorelement is below the first bipolar memory element and the second doubleselector element is above the second bipolar memory element.
 20. Themethod of claim 17, wherein the first bipolar memory and the secondbipolar memory element each comprise a resistive random access memory(RRAM) device, or each comprise a magnetic tunnel junction (MTJ) device.